软x射线投影光刻“前端”照明系统的设计考虑

Soft-X-Ray Projection Lithography Pub Date : 1900-01-01 DOI:10.1364/sxray.1992.mb1

N. Ceglio

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摘要

我们将“前端”或照明系统定义为包括产生x射线所需的所有组件，并将它们传输到掩模并适当地照亮掩模。我们将系统地讨论限制软x射线投影光刻照明系统设计的制约因素。

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Design Considerations for a "Front End" Illumination System for Soft X-ray Projection Lithography

We define the "front-end" or illumination system to include all those components necessary to produce the x-rays, and to transport them to and appropriately illuminate the mask. We will provide a systematic discussion of the constraints that limit the design of an illumination system for soft x-ray projection lithography.

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Soft-X-Ray Projection Lithography

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