晶圆级坐标测量-从单个传感器到传感器阵列

{"title":"晶圆级坐标测量-从单个传感器到传感器阵列","authors":"T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, S. Buttgenbach","doi":"10.1007/978-3-319-10948-0_19","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":374655,"journal":{"name":"2013 Seventh International Conference on Sensing Technology (ICST)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Coordinate measurement on wafer level — From single sensors to sensor arrays\",\"authors\":\"T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, S. Buttgenbach\",\"doi\":\"10.1007/978-3-319-10948-0_19\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":374655,\"journal\":{\"name\":\"2013 Seventh International Conference on Sensing Technology (ICST)\",\"volume\":\"102 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Seventh International Conference on Sensing Technology (ICST)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/978-3-319-10948-0_19\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Seventh International Conference on Sensing Technology (ICST)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-319-10948-0_19","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}