Development of an Ultra-Small Angular Rate Sensor Element with a Laminated Quartz Tuning Fork

The authors have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 times 2.2 times 0.24 mm3) is so small that it can be applied to the 2.5 times 3.2 times 1.3 mm 3 surface mount type angular rate sensor. This ultra-small angular rate sensor element consisted of weighted longer arms and a winged base part for damper. According to the experimental result, it was confirmed that the scale factor was 0.67 mV/(deg/s), zero point voltage was 1.349 V and the maximum angular rate was plusmn 210 deg/s