{"title":"与x射线光刻有关的源问题","authors":"K. Nguyen, D. Attwood, T. Gustafson","doi":"10.1364/sxray.1991.tha1","DOIUrl":null,"url":null,"abstract":"Synchrotrons and laser-produced plasmas (LPPs) are leading candidates for radiation sources for x-ray lithographic systems. Each has its own strengths and weaknesses. Synchrotrons offer higher flux and brightness but are large and expensive. Laser-produced plasmas sources may be cheaper and smaller but have low average power and non-directional output.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Source Issues Relevant to X-Ray Lithography\",\"authors\":\"K. Nguyen, D. Attwood, T. Gustafson\",\"doi\":\"10.1364/sxray.1991.tha1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Synchrotrons and laser-produced plasmas (LPPs) are leading candidates for radiation sources for x-ray lithographic systems. Each has its own strengths and weaknesses. Synchrotrons offer higher flux and brightness but are large and expensive. Laser-produced plasmas sources may be cheaper and smaller but have low average power and non-directional output.\",\"PeriodicalId\":409291,\"journal\":{\"name\":\"Soft-X-Ray Projection Lithography\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soft-X-Ray Projection Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/sxray.1991.tha1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1991.tha1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Synchrotrons and laser-produced plasmas (LPPs) are leading candidates for radiation sources for x-ray lithographic systems. Each has its own strengths and weaknesses. Synchrotrons offer higher flux and brightness but are large and expensive. Laser-produced plasmas sources may be cheaper and smaller but have low average power and non-directional output.
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