基于光点的六自由度绝对位置和姿态同时测量方法

Ruimao Ma, Jianquan Zhang, Wenbo Dong, Jiaqi Yu, Jiancheng Liu, W. Ge, Jianguo He, Meng Yu, Aimin Xiao
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摘要

提出了一种基于光点同时测量六自由度绝对位置和姿态的新方法。该系统由一个测量单元和一个运动目标组成:测量单元包括一个激光器、三个立方体角反射器(CCR)、三个CMOSs和一些分束器;目标是一个立方体,在它的三个正交平面上各安装了三个ccr。在测量单元中,激光分为三个参考光和三个被测光,从六个ccr返回后由三个CMOSs检测。在光路矢量分析的基础上,建立了运动目标的6自由度位置和姿态与三个CMOSs输出坐标之间的关系。该方法能够同时测量目标沿三个正交轴的平移运动和旋转运动,实现目标的绝对定位,克服了基于激光干涉的测量系统无法测量绝对位置和姿态的缺点。通过蒙特卡罗随机仿真和目标运动范围内的正弦轨迹仿真,验证了该方法的准确性。仿真结果表明,位置误差小于0.5 μm,姿态误差小于2.3″,表明算法误差不超过CMOS最小像元尺寸。该六自由度绝对位姿同时测量方法简单、精度高,在各种精密加工领域具有很大的应用潜力。
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Simultaneous measurement method of six-degree-of-freedom absolute position and attitude based on light spots
This article presents a novel method to simultaneously measure the six-degree-of-freedom (6-DOF) absolute position and attitude based on light spots. The proposed system consists of a measurement unit and a moving target: the measurement unit contains a laser, three cube corner retroreflectors (CCR), three CMOSs, and some beam splitters; the target is a cube with three CCRs installed on each of its three orthogonal planes. In the measurement unit, the laser is split into three reference lights as well as three measured lights which are detected by three CMOSs after returning from six CCRs. Based on the vector analysis of the optical path, the relationship between 6-DOF position and attitude of the moving target and the output coordinates of three CMOSs is established. This method is capable of simultaneously measuring translational motions along as well as rotational motions around three orthogonal axes and achieving the absolute positioning of the target, which has overcome the shortage that the measurement systems based on laser interference can not measure absolute position and attitude. The accuracy of this method has been verified by Monte Carlo stochastic simulation and sinusoidal trajectory simulation in the range of the target’s motion. The simulation results show that the errors of position are less than 0.5 μm and the errors of attitude are less than 2.3 ″, which indicates the algorithm error is no more than the minimum pixel size of CMOS. This 6-DOF absolute pose simultaneous measurement method with simplicity and high precision has great potential for application in various precision machining fields.
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