A. Romani, N. Manaresi, L. Marzocchi, G. Medoro, A. Leonardi, L. Altomare, M. Tartagni, R. Guerrieri
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Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip
Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35/spl mu/m 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is /spl les/1.6mV, the resolution of the 12b ADC.
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