{"title":"准分子气体放电负荷匹配条件的估计","authors":"K. Oleg, M. Serguei, N. Mutsuo, M. Hideaki","doi":"10.1109/IAS.2002.1044098","DOIUrl":null,"url":null,"abstract":"Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.","PeriodicalId":202482,"journal":{"name":"Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)","volume":"354 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Estimation of load matching conditions for the excimer gas discharge load\",\"authors\":\"K. Oleg, M. Serguei, N. Mutsuo, M. Hideaki\",\"doi\":\"10.1109/IAS.2002.1044098\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.\",\"PeriodicalId\":202482,\"journal\":{\"name\":\"Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)\",\"volume\":\"354 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IAS.2002.1044098\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Record of the 2002 IEEE Industry Applications Conference. 37th IAS Annual Meeting (Cat. No.02CH37344)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IAS.2002.1044098","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Estimation of load matching conditions for the excimer gas discharge load
Excimer gas discharge is recognized as an effective method of ultraviolet light generation, however low energy performances of power supply for such a load hinder its wider application in practice. In order to design more efficient power supply, in this research, frequency characteristics and power matching conditions of the excimer gas discharge load are evaluated. A new method for this evaluation is proposed and the results of its application are introduced in this paper, together with some consideration about power supply.
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