光栅机械刻痕铝膜显微组织及力学性能分析

Baoqing Zhang, G. Shi, G. Shi
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引用次数: 0

摘要

目前,光栅机械刻痕制造是将金刚石刻痕在真空镀膜于铬、玻璃等基材上的铝膜上往复运动的工艺。流铝膜的组织和性能对沟槽质量影响较大,且受真空蒸汽工艺的限制,膜的组织和力学性能难以控制和测试。本文介绍了一种将x射线衍射“无损”检测技术与纳米压痕检测技术相结合的新方法。该方法可以计算铝膜的微观组织、厚度和残余应力,分析铝膜的弹性模量、硬度和应力-应变曲线等力学性能,从而揭示铝膜的微观组织和力学性能。为研究薄膜的微观结构和力学性能提供了可行的方法,也为光栅机械技术提供了有价值的参考和指导。
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Analysis on the microstructure of grating mechanical scored Aluminum film and mechanical properties
At present time, grating mechanical scoring manufacture is process that diamond score reciprocates on the Aluminum film which is vacuum coating on the Chrome, glass and other substrates. As the structure and properties of stream Aluminum film affect the quality of groove greatly and are limited by the vacuum steam process, it is difficult to control and test the microstructure and mechanical properties of the film. In this paper, we recommend the new method that combine X-ray diffraction "nondestructive" test and nanopress-scratch testing technology. We can calculate the micro-structure, the aluminum film thickness and residual stress, analysis on the mechanical properties such as elastic modulus, hardness and stress-strain curve in this method in order to unveil the microstructure and mechanical properties of the aluminum film. Provide a feasible method for studying the microstructure and mechanical properties of the film and valuable reference and guidance on grating mechanical technology.
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