Design Automation for Micro-Electro-Mechanical Systems

This paper demonstrates and discusses a highly automated approach for the design of micro-elec-tro-mechanical systems (MEMS) and system-level multidomain reduced order model generation. The presented techniques in form of rigid body models (RBM) and modal superposition models (MSUP) in conjunction with component mode synthesis (CMS) enable fast and efficient model adaption and optimization of components in the different phases of the MEMS design process by providing sufficiently fast and accurate modeling solutions. Different aspects and requirements of individual methods are discussed and compared.