50MHz球形超声换能器的有限元仿真与设计

M. Cui, Rui-biao Guo, Shu Xue, Yong-chuan Li, M. Qian
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摘要

本文通过合理的有限元模型对影响球形超声换能器性能的各参数进行了仿真,得到了50MHz球形超声换能器的最优设计参数。仿真结果表明,计算得到球形超声换能器的陶瓷厚度为40.9um,中心频率为50MHz;球面孔径半径为550um,振动模式单一;球面曲率半径对换能器的声学性能影响较大,因此最佳的球面曲率半径应小于陶瓷孔径半径,可以提高声场的焦点光斑和换能器的灵敏度;增加声学匹配层可以提高传输能力和声场聚焦能量,最佳匹配层厚度约为13.5um。
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The finite element simulation and design of a 50MHz spherical ultrasonic transducer
In this paper, each parameter affecting the performance of spherical ultrasonic transducer is simulated by a reasonable finite element model (FEM), and optimal design parameters are obtained for a 50MHz spherical ultrasonic transducer. Simulation results show that the ceramic thickness of spherical ultrasonic transducer is calculated to be 40.9um and the center frequency is 50MHz; The radius for spherical aperture is 550um and the vibration mode is single; The acoustic performance is greatly impacted by the radius of spherical curvature, so the best radius of spherical curvature should be less than the radius of ceramic aperture, and the focal spot of the acoustic field and the sensitivity of the transducer can be improved; Adding an acoustic matching layer can improve the transmission capacity and the sound field focused energy, and the best matching layer thickness is approximately 13.5um.
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