热循环下微凹凸互连中β-Sn晶粒择优生长与热力学响应的相互作用

S. Liang, Xin-Ping Zhang, C. Wei, C. Ke, Changqing Liu
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摘要

由于β-Sn的热膨胀系数(CTE)和弹性刚度具有明显的各向异性特征,特别是随着电子学中三维集成电路特征尺寸的急剧减小,β-Sn晶粒的取向对微凸点互连的热力学行为有很大的影响。同时,不同取向晶粒的变形所产生的弹性能也会影响热循环过程中晶粒的形态演变。因此,由于微碰触互连的各向异性,对其可靠性产生了新的关注。本文采用相场模型模拟了Cu/Sn/Cu微碰触互连材料在热循环过程中晶粒形貌的动态演变,该相场模型考虑了温度和热应力引起的晶粒弹性变形能的影响。研究了β-Sn的弹性各向异性和CTE各向异性对不同晶粒形态微凹凸互连热力学行为的影响,研究了晶粒形态演化与微凹凸互连热力学行为的相互作用,重点研究了微凹凸互连焊料中不同取向β-Sn晶粒的平均直径和平均von Mises应力的变化。
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Interaction effects between the preferred growth of β-Sn grains and thermo-mechanical response in microbump interconnects under thermal cycling
orientations of β-Sn grains have a big influence on the thermo-mechanical behavior of the microbump interconnect due to the obvious anisotropic features of thermal expansion coefficient (CTE) and elastic stiffness of β-Sn, especially with the dramatic decrease in the feature size of 3D ICs in electronics. Simultaneously, the elastic energy, induced by the deformation of grains with different orientations, can affect the grain morphology evolution during thermal cycling. Thus, some new concerns of reliability of the microbump interconnect are emerging due to the anisotropic behavior. In this study, dynamic evolution of grain morphology of the Cu/Sn/Cu microbump interconnect during thermal cycling is simulated using the phase field model, which incorporates the effects of temperature and elastic deformation energy in the grains induced by the thermal stress. The influence of the elastic and CTE anisotropy of β-Sn on the thermo-mechanical behavior of microbump interconnects with different grain morphologies is investigated, and the interaction effects of grain morphology evolution and thermo-mechanical behavior in the microbump interconnect are studied, with focus on the variations of the average diameter and average von Mises stress of β-Sn grains with different orientations in the solder of the microbump interconnect.
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