功能梯度纳米铜层状晶圆中的SH波

Yi-feng Hu, Xiaoshan Cao, Yixun Niu, Yanyun Ru
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引用次数: 1

摘要

为了解决SH波在功能梯度纳米铜层晶片中的传播问题,本文采用幂级数法求解变系数控制方程。研究了单层结构和多层结构中的SH波。结果表明:在功能梯度纳米铜片中,SH波存在多种模式,梯度特性导致相速度减小,相速度变化的绝对值与梯度系数呈正相关。与其他模态相比,模态2的相速度变化和相速度变化率都很小。模式4推荐用于无损评估。研究结果可为纳米材料层状结构的无损评价提供理论指导。
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SH Waves in A Functionally Graded Nano Copper Layered Wafer
To solve the problem of SH wave propagation in a functionally graded nano copper layered wafer, in this paper the power series technique is employed to solve governing equations with variable coefficients. SH waves in a single-layer structure and a multi-layered structure are investigated. The results show that multiple modes for SH waves exist in functionally graded nano copper wafers, the gradient property leads to decreased phase velocity, and the absolute value of the phase velocity variation is positively correlated with the gradient coefficient. Both the phase velocity variation and the phase velocity variation rate in Mode 2 are small compared with the other modes. Mode 4 is recommended for nondestructive evaluation. These results should provide theoretical guidance for nondestructive evaluation in functionally graded nano material layered structures.
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