基于Delta-Sigma的射频输出CMOS应力传感器

2006 IEEE Asian Solid-State Circuits Conference Pub Date : 2006-11-01 DOI:10.1109/ASSCC.2006.357896

Yonggang Chen, R. Jaeger, J. Suhling

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引用次数: 10

摘要

将CMOS应力传感器与δ - σ调制器合并，产生具有低频RF输出的传感器。采用两个正交晶体管的PMOS电流反射镜作为应力传感器。δ - σ调制器产生一个输出信号，该信号可以被数字处理或由通信接收器监控。调制器DSBSC输出的频移与传感器单元中应力引起的失配成正比。采用1.5 μ m MOSIS CMOS工艺制作了演示传感器的测试芯片。

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Delta-Sigma Based CMOS Stress Sensor with RF Output

A CMOS stress sensor is merged with a delta-sigma modulator to produce a sensor with a low frequency RF output. A PMOS current mirror with two orthogonal transistors is used as the stress sensor. The delta-sigma modulator generates an output signal that can be processed digitally or monitored by a communications receiver. The frequency shift of the DSBSC output of the modulator is directly proportional to the stress induced mismatch in the sensor cell. A test chip demonstrating the sensor has been fabricated using the 1.5 mum MOSIS CMOS process.

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2006 IEEE Asian Solid-State Circuits Conference

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