利用器件模拟器结合正交阵列优化InAlGaAs/lnP MQW激光二极管的设计

J. Darja, S. Narata, N. Chen, Y. Nakano
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引用次数: 0

摘要

借助器件模拟器,设计了1.3 /spl μ m波长下InAlGaAs/InP MQW激光二极管的最佳生长和工艺参数。在实际模拟之前,使用大面积InGaAlAs/InP激光二极管L-I测量结果校准了模拟中使用的材料参数。利用商业仿真软件LASTIP结合正交阵列(OAs)或田口法进行仿真,确定最优设计条件。
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Use of a device simulator in conjunction with orthogonal arrays in optimizing the design of InAlGaAs/lnP MQW laser diodes
With the aid of a device simulator, design of experiments for the optimal growth and process parameters of InAlGaAs/InP MQW laser diodes at 1.3 /spl mu/m wavelength is illustrated. Prior to the actual simulation, the materials' parameters used in the simulation are calibrated with the result from broad area InGaAlAs/InP laser diode L-I measurements. Simulation by LASTIP, a commercial simulation software in conjunction with orthogonal arrays (OAs), or the Taguchi method are used to locate an optimal design condition.
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