S. S. Shariffudin, M. H. Mamat, S. H. Herman, M. Rusop
{"title":"不同沉积层制备ZnO纳米颗粒薄膜的特性","authors":"S. S. Shariffudin, M. H. Mamat, S. H. Herman, M. Rusop","doi":"10.1109/SHUSER.2012.6269005","DOIUrl":null,"url":null,"abstract":"Layer-by-layer ZnO nanoparticles thin films were deposited using sol-gel spin coating technique. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used in the ZnO solution. Different numbers of film layers were employed to study their effects to the physical, electrical and optical properties of the thin films. XRD patterns showed that the films were single crystalline with highly c-axis orientation for films with higher numbers of deposition layers. Morphology studies revealed that the grain sizes increased with the number of layers. Resistivity of the film decreased with the increased number of layers with minimum value of 15.5 Ω.cm given by 6 layers film. The PL spectra exhibit highest UV emission for 6 layers film due to high crystalline quality of the thin film.","PeriodicalId":426671,"journal":{"name":"2012 IEEE Symposium on Humanities, Science and Engineering Research","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Characteristics of layer-by-layer ZnO nanoparticles thin films prepared with different deposition layer\",\"authors\":\"S. S. Shariffudin, M. H. Mamat, S. H. Herman, M. Rusop\",\"doi\":\"10.1109/SHUSER.2012.6269005\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Layer-by-layer ZnO nanoparticles thin films were deposited using sol-gel spin coating technique. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used in the ZnO solution. Different numbers of film layers were employed to study their effects to the physical, electrical and optical properties of the thin films. XRD patterns showed that the films were single crystalline with highly c-axis orientation for films with higher numbers of deposition layers. Morphology studies revealed that the grain sizes increased with the number of layers. Resistivity of the film decreased with the increased number of layers with minimum value of 15.5 Ω.cm given by 6 layers film. The PL spectra exhibit highest UV emission for 6 layers film due to high crystalline quality of the thin film.\",\"PeriodicalId\":426671,\"journal\":{\"name\":\"2012 IEEE Symposium on Humanities, Science and Engineering Research\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE Symposium on Humanities, Science and Engineering Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SHUSER.2012.6269005\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE Symposium on Humanities, Science and Engineering Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SHUSER.2012.6269005","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characteristics of layer-by-layer ZnO nanoparticles thin films prepared with different deposition layer
Layer-by-layer ZnO nanoparticles thin films were deposited using sol-gel spin coating technique. Zinc acetate dihydrate, 2-methoxyethanol and monoethanolamine were used in the ZnO solution. Different numbers of film layers were employed to study their effects to the physical, electrical and optical properties of the thin films. XRD patterns showed that the films were single crystalline with highly c-axis orientation for films with higher numbers of deposition layers. Morphology studies revealed that the grain sizes increased with the number of layers. Resistivity of the film decreased with the increased number of layers with minimum value of 15.5 Ω.cm given by 6 layers film. The PL spectra exhibit highest UV emission for 6 layers film due to high crystalline quality of the thin film.