{"title":"反射成像系统的公差","authors":"Masaaki Itou, T. Terasawa","doi":"10.1364/sxray.1992.tua5","DOIUrl":null,"url":null,"abstract":"A number of reflective imaging systems have been designed for use in soft X-ray projection lithography.1,2 Optical surface figure errors in these imaging systems, however, degrade resolution as well as cause changes in image positions, which in turn degrade overlay accuracy. We therefore evaluate the figure tolerances of a four-mirror imaging system by ray-tracing calculations.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Tolerances of a Reflective Imaging System\",\"authors\":\"Masaaki Itou, T. Terasawa\",\"doi\":\"10.1364/sxray.1992.tua5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A number of reflective imaging systems have been designed for use in soft X-ray projection lithography.1,2 Optical surface figure errors in these imaging systems, however, degrade resolution as well as cause changes in image positions, which in turn degrade overlay accuracy. We therefore evaluate the figure tolerances of a four-mirror imaging system by ray-tracing calculations.\",\"PeriodicalId\":409291,\"journal\":{\"name\":\"Soft-X-Ray Projection Lithography\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soft-X-Ray Projection Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/sxray.1992.tua5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1992.tua5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A number of reflective imaging systems have been designed for use in soft X-ray projection lithography.1,2 Optical surface figure errors in these imaging systems, however, degrade resolution as well as cause changes in image positions, which in turn degrade overlay accuracy. We therefore evaluate the figure tolerances of a four-mirror imaging system by ray-tracing calculations.
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