1077nm,连续波镜面薄膜损伤竞赛

Laser Damage Pub Date : 2022-12-02 DOI:10.1117/12.2641371
R. Negres, C. Stolz, S. DeFrances, D. Bernot, J. Randi, Jeffrey G. Thomas
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引用次数: 0

摘要

今年的竞赛旨在调查用于连续波(CW)激光应用的近红外高反射器的抗损伤性。对涂层的要求是在1077 nm光的正常入射下,最低反射率为99.5%。参与者选择了涂层材料、涂层设计和沉积方法。样品在单个测试设备上使用kW光纤激光源进行损伤测试,该光纤激光源能够在目标上提供高达10 MW/cm2的峰值辐照度。双盲测试保证了样本和提交者的匿名性。损坏性能结果、样品排名、沉积过程的细节、涂层材料和基材清洁方法都是共享的。我们发现,在连续激光照射下,以钽或铪为高折射率材料的多层涂层在几个涂层沉积组中表现最好。也就是说,离子束溅射(IBS)、等离子体增强原子层沉积(PEALD)和磁控溅射(MS)的致密涂层在连续激光照射下具有最低的吸收和温升,并且在达到本研究中可用的最大功率密度水平时不会发生损伤。
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1077-nm, CW mirror thin film damage competition
This year’s competition proposed to survey the damage resistance of near-IR high reflectors designed for continuous-wave (CW) laser applications. The requirements for the coatings were a minimum reflection of 99.5% at normal incidence for 1077-nm light. The participants in this effort selected the coating materials, coating design, and deposition method. Samples were damage tested at a single testing facility using a kW fiber laser source capable of delivering up to 10 MW/cm2 peak irradiance on target. A double blind test assured sample and submitter anonymity. The damage performance results, sample rankings, details of the deposition processes, coating materials and substrate cleaning methods are shared. We found that multilayer coatings using tantala or hafnia as high index materials were top performers under CW laser exposure within several coating deposition groups. Namely, dense coatings by ion-beam sputtering (IBS), plasma-enhanced atomic layer deposition (PEALD) and magnetron sputtering (MS) exhibited the lowest absorption & temperature rise upon CW laser irradiation without damage onset up to the maximum power density level available in this study.
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