{"title":"压力传感器微机电结构退化过程研究","authors":"S. A. Adarchin, A.S. Kuzhnenkov","doi":"10.1109/APEIE.2000.913113","DOIUrl":null,"url":null,"abstract":"The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined.","PeriodicalId":184476,"journal":{"name":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","volume":"215 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Degradation process research of microelectromechanical structures of pressure transducers\",\"authors\":\"S. A. Adarchin, A.S. Kuzhnenkov\",\"doi\":\"10.1109/APEIE.2000.913113\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined.\",\"PeriodicalId\":184476,\"journal\":{\"name\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"volume\":\"215 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APEIE.2000.913113\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APEIE.2000.913113","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Degradation process research of microelectromechanical structures of pressure transducers
The paper analyses temperature hysteresis of pressure transducer output signal and reveals its regular change with time. A mathematical model of hysteresis temporal increase is created, and its effect on reliability of pressure transducers is determined.