集成铌薄膜空气桥作为千兆赫调谐电路的可变电容器

Proceedings of the 5th European Workshop on Low Temperature Electronics Pub Date : 2002-11-07 DOI:10.1109/WOLTE.2002.1022477

M. Schicke, K. Schuster

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引用次数: 1

摘要

超导GHz电子学可以通过可变调谐电路来改进。我们提出了一种低温(< 150°C)工艺，用于制造铌(Nb)薄膜空气桥作为可变电容器，可以集成在铌超导电子器件中。这些元件可用于片上滤波器、谐振器和调谐电路的调整。将对桥梁静电驱动的测量和计算进行比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits

Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (< 150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.

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Proceedings of the 5th European Workshop on Low Temperature Electronics

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