亚奈奎斯特多波长干涉测量中光学表面相位图的鲁棒检索

P. Psota, V. Ledl, P. Vojtíšek, O. Matousek
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引用次数: 0

摘要

本文报道了一种非零值双波长干涉测量中的相位恢复方法。它采用合成相位作为形状估计,确定每个像素内的条纹阶数。条纹序图随后用于较短波长的相位解包裹。实验表明,即使合成相位不准确,短波长的计算相位也是正确的。对相位畸变敏感性较低的空间导数进行相场分析,而不是对相场本身进行分析。
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Robust retrieval of optical surfaces phase maps in sub-Nyquist multi-wavelength interferometry
This paper reports on phase retrieval method in non-nulling dual-wavelength interferometry. It uses synthetic phase as shape estimation for determination of fringe orders within every pixel. The fringe order map is subsequently used for unwrapping of phase measured at shorter wavelengths. It was experimentally shown that even for inaccurate synthetic phase, the computed phase for short wavelength is correct. The key point is in analysis of phase fields in spatial derivatives where the sensitivity to phase distortions is lower instead of analyzing the phase fields themselves.
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