用于漫反射信号提取的硅光电二极管的表征

S. Pimenta, J. P. Carmo, R. G. Correia, G. Minas, E. M. Castanheira
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引用次数: 4

摘要

早期发现胃肠道肿瘤一直是医学界关注的焦点之一。早期发现对提高患者的生存机会至关重要。光信号的提取和分析,特别是漫反射和本征荧光,可能会提高检测GI异常增生的能力,一旦组织上的一些形态学和生化变化(与癌症早期进展有关)可以改变这些信号的形状和强度。本课题旨在开发一种芯片大小的光谱微系统,用于早期检测胃肠道肿瘤。本文介绍了在标准的0.7 μm CMOS工艺中制备的不同尺寸pn结硅光电二极管(n+/p-epilayer型)的特性。为了漫反射和本征荧光信号的测量,必须实现由16个光电二极管组成的阵列。主要目标是总结光电二极管的最小尺寸,考虑其在相关光谱带(350 nm-750 nm)提取信号的能力,不包括微系统尺寸。通过本研究,可以得出结论,100 × 100 μm2的有源区域具有适合提取漫反射信号的量子效率,并通过代表胃肠道组织的测试体验证了这一结论。
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Characterization of silicon photodiodes for diffuse reflectance signal extraction
Early detection of gastrointestinal (GI) cancers is one of most important concerns in medical field. Its detection at the earliest stage is crucial to increase the patient survival chances. Optical signals extraction and analysis, specifically diffuse reflectance and intrinsic fluorescence, may improve the ability to detect GI dysplasia, once some morphological and biochemical changes on the tissues (related with early cancer progression) can modify these signals' shape and intensity. The project under this paper aims to develop a chip-sized spectroscopy microsystem for the early detection of GI cancer. This paper presents the characterization of different dimensions pn-junction silicon photodiodes (n+/p-epilayer type) fabricated in a standard 0.7 μm CMOS process. An array comprising 16 of those photodiodes must be implemented for the diffuse reflectance and intrinsic fluorescence signals measurements. The main goal is to conclude about the photodiodes minimum dimensions, taking into account its capacity to extract the signals in the relevant spectral band (350 nm-750 nm), not comprising the microsystem dimensions. With this study, it can be concluded that a 100 × 100 μm2 active area presents a quantum efficiency suitable to extract diffuse reflectance signals, which was proven using a test phantom representative of a GI tissue.
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