磁控溅射生长氧化氮薄膜的外延

{"title":"磁控溅射生长氧化氮薄膜的外延","authors":"Faezeh Alijan Farzad Lahiji","doi":"10.3384/9789180750196","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":303036,"journal":{"name":"Linköping Studies in Science and Technology. Licentiate Thesis","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-02-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Epitaxy of oxide and nitride thin films grown by magnetron sputtering\",\"authors\":\"Faezeh Alijan Farzad Lahiji\",\"doi\":\"10.3384/9789180750196\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":303036,\"journal\":{\"name\":\"Linköping Studies in Science and Technology. Licentiate Thesis\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-02-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Linköping Studies in Science and Technology. Licentiate Thesis\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3384/9789180750196\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Linköping Studies in Science and Technology. Licentiate Thesis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3384/9789180750196","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}