基于有限元的Ba0.8Sr0.2TiO3可调谐BAW谐振器建模

2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM) Pub Date : 2017-05-01 DOI:10.1109/ISAF.2017.8000200

Daw A. Asderah, T. Kalkur

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引用次数: 2

摘要

本文利用Ba0.8Sr0.2TiO3薄膜的电致伸缩和压电效应，采用有限元法和基于多物理场的方法对可调谐铁电薄膜谐振器进行了三维建模。介质介电常数和弹性系数与直流电场的关系可以控制薄膜中的共振。该谐振器的串联谐振频率为4.33 GHz，并联谐振频率为4.43 GHz，外加直流电压为2 V。测量到机电耦合系数为5.4%，当偏置电压为8V时，机电耦合系数增加到8%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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FEM based modeling of tunable BAW resonators with Ba0.8Sr0.2TiO3

In this paper, a finite element method and multiphysics based 3D modeling of tunable ferroelectric thin film resonator taking the advantages of electrostrictive and piezoelectric effects of Ba0.8Sr0.2TiO3 thin film. DC electrical field dependency of the dielectric permittivity and elasticity coefficients can control the resonances in the thin film. The resonator has a series resonant frequency of 4.33 GHz and parallel resonance at 4.43 GHz with applied DC voltage of 2 V. The electromechanical coupling coefficient is measured at 5.4% and increased to be 8% with the biasing voltage at 8V.

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2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM)

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