{"title":"纳秒激光在开放气氛条件下对金属薄膜的热解沉积研究","authors":"D. V. Chesnokov, V. V. Chesnokov","doi":"10.1109/APEIE.2000.913085","DOIUrl":null,"url":null,"abstract":"The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.","PeriodicalId":184476,"journal":{"name":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Pyrolytic deposition of metal films on substrates in conditions of the open atmosphere initiated by nanosecond laser irradiation\",\"authors\":\"D. V. Chesnokov, V. V. Chesnokov\",\"doi\":\"10.1109/APEIE.2000.913085\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.\",\"PeriodicalId\":184476,\"journal\":{\"name\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APEIE.2000.913085\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 5th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings. APEIE-2000. Devoted to the 50th Anniversary of Novosibirsk State Technical University. Vol.1 (Cat","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APEIE.2000.913085","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Pyrolytic deposition of metal films on substrates in conditions of the open atmosphere initiated by nanosecond laser irradiation
The analysis of conditions of pyrolytic deposition of films of metals initiated by a nanosecond laser exposure of a substrate in a mixture of organometallic vapors with noble gas at atmospheric pressure are presented. The processes of pyrolysis can occur both in the adsorbed layer, and in a gas phase.
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