在线测试对于确保产品的高可靠性日益重要

P. Nigh
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引用次数: 17

摘要

对于采用先进技术(90纳米及更小)制造的产品来说,实现高可靠性变得越来越具有挑战性。[国际技术半导体路线图,20021]造成这一趋势的原因有很多——下面是一个简短的总结。这一趋势将迫使IC制造商采用新的测试和应力方法,并通过系统架构增强来提高产品可靠性,包括广泛使用在线测试。在这篇总结文章中,我将描述推动这一变化的关键问题,并描述一些可用于提高最终产品可靠性的方法。我相信,用于改进芯片和封装测试的许多相同方法可以用于提高系统级别的可靠性。事实上,如果不使用这些方法,随着时间的推移,产品的可靠性可能会降低,这对许多应用来说是不可接受的。在晶圆或封装级测试期间,使筛选所有缺陷变得更加困难的问题包括:对于先进技术来说,细微的、难以检测的缺陷增加了。这些缺陷包括电阻通孔、电阻短路和植入体变形。这些缺陷类型可能只会导致轻微的性能异常,而这些异常很难用最先进的测试方法彻底地检测出来。例如,这种缺陷可能只会导致几皮秒的延迟。细微的缺陷(如电阻过孔)可能会随着使用而退化,并且不能通过传统的方法(依赖于电压和温度加速)(如老化)很好地进行应力处理。这些缺陷可能只会因电流密度的变化而加速,这需要对器件施加不同的电路状态进行多次循环。强调这些缺陷的困难将促使制造商改进他们的测试方法——使这些缺陷能够被检测出来,而不是加速。可靠性型缺陷的应力方法的有效性正在下降。例如,对于先进技术,应用和高压应力测试之间的电压差正在减小,导致应力有效性呈指数级下降。由于在磨损时泄漏电流非常高,磨损应力变得有问题。由于泄漏电流的增加,IDDQ测试变得不那么有效。应用条件和设备实际操作位置之间的差距正在缩小。对于0.18um的产品,在设计目标VDD电压和测试时(在较慢的条件下)的最小功能VDD之间存在开放的1伏特余量。对于90nm,这个余量可能会缩小到200mV以下。许多应用将减少VDD电压以外的其他参数(如温度和速度)的余量,这可能导致更多的间歇性故障。可靠性类型的故障可能很快由“预期的”性能退化引起,例如负偏置温度不稳定性(NBTI)。考虑到这些预期的性能下降,IC供应商必须决定如何解决器件速度变慢的问题。无论如何,可以监视性能的在线测试将是监视这些退化的重要改进。
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The increasing importance of on-line testing to ensure high-reliability products
It is becoming more challenging to achieve very high reliability for products made with advanced technologies (90nm and smaller). [International Technology Semiconductor Roadmap, 20021 There are a variety of reasons for this trend--a brief summary is included below. This trend will force IC manufacturers to adopt new test and stress methods and to improve product reliability using system architecture enhancements-including the use of extensive on-line testing. ln this summary paper, I will describe the key problems driving this change and describe some of the methods that can be used to improve final product reliability. I believe that many of the same methods used to improve testing at the chip and package can be used to improve reliability at the system level. In fact, if such methods are not used there is likelihood that products may become less reliable over time-which is not acceptable to many applications. The issues that make it more difficult to screen all defects during wafer or package-level testing include: There is an increase in subtle, hard-to-detect defects for advanced technologies. Such defects include resistive vias, resistive shorts and implant deformations. These defect types may cause only minor performance abnormalities that are very difficult to exhaustively detect using state-of-the-art test methods. Such defects may cause only a few picoseconds of delay, for example. Subtle defects (such as resistive vias) may degrade with use and are not stressed well by conventional methods (relying on voltage and temperature acceleration) such as burn-in. These defects may only be accelerated by current density changes requiring many cycles of applying various circuit states to the device. Difficulty in stressing these defects will drive manufacturers to improve their test methods-nabling these defects to be detected rather than accelerated. The effectiveness of stress methods for reliabilitytype defects is degrading. For example, the difference in voltage between the application and high-voltage stress testing is decreasing for advanced technologies causing an exponential decrease in stress effectiveness. Burn-in stressing is becoming problematic due to very high leakage currents at burn-in. IDDQ testing is becoming less effective due to increasing leakage currents. The margin between the application condition and where the device actually operates is eroding. For 0.18um products, there was open I Volt of margin between the design target VDD voltage and the minimum functional VDD at test (at slower conditions). For 90nm, this margin may shrink to less than 200mV. Many applications will have reduced margins for other parameters than VDD voltage (such as temperature & speed) which may lead to more intermittent failures. Reliability-type failures may soon be caused by “expected” performance degradations such as Negative Bias Temperature Instability (NBTI). Given these expected degradations, IC suppliers must decide how to account for devices slowing down. Regardless, on-line testing that can monitor performance will be a significant improvement in monitoring for these degradations.
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