侧向电场激励的LiTaO3超声换能器

Zhitian Zhang, T. Ma, Chao Zhang, Wenyan Wang, G. Feng
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摘要

由电场激发的横跨压电基板厚度的厚度扩展模式长期以来被用于各种应用。本文采用扩展的Christoffel-Bechmann方法,研究了侧向电场在LiTaO3上激发的厚度扩展模式的性质。结果表明,在X-cut LiTaO3上,a模(准张模)的侧向场激发耦合系数达到最大值17.4%。研究了x -切割LiTaO3的LFE器件的特性,并将该器件用于高频超声换能器的设计。采用传统的KLM模型对LiTaO3 LFE超声换能器的特性进行了分析,并采用传统的脉冲/回波法对其进行了测试。得到了中心频率为33.18MHz、- 6dB带宽为29.99%的LiTaO3 LFE超声,与KLM模型的结果吻合较好。进一步分析表明,LiTaO3 LFE器件在宽带高频超声换能器设计中具有很大的潜力。
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LiTaO3 ultrasonic transducer excited by lateral electric field
Thickness extension mode excited by electric field across the thickness of piezoelectric substrate has long been used for various applications. In the present study, the properties of thickness extension mode excited by lateral electric field on LiTaO3 have been investigated using the extended Christoffel-Bechmann method. It is found that the Lateral field excitation (LFE) coupling factors for a-mode (quasi-extensional mode) reaches its maximum value of 17.4% on X-cut LiTaO3. The characteristics of an LFE device made of X-cut LiTaO3 have been investigated and the LFE device was used for the design of a high frequency ultrasonic transducer. The characteristic of the LiTaO3 LFE ultrasonic transducer was analyzed with the traditional KLM model and tested using traditional pulse/echo method. A LiTaO3 LFE ultrasonic with the center frequency of 33.18MHz and the −6dB bandwidth of 29.99% was acquired, which was well in agreement with the results of the KLM model. Further analysis suggests that the LiTaO3 LFE device has great potential in the design of broadband high frequency ultrasonic transducers.
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