基于MEMS的零检波器和交流电压基准

29th Conference on Precision Electromagnetic Measurements (CPEM 2014) Pub Date : 2014-10-02 DOI:10.1109/CPEM.2014.6898440

A. Manninen, P. Helisto, H. Sipola, L. Roschier, I. Iisakka, P. Immonen

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引用次数: 1

摘要

本文描述了我们在微机电系统(MEMS)的两个应用方面的工作:一个可以用作零检测器的敏感电压表，以及一个独立的交流电压基准。这两种应用都是基于动板电容器的拉入效应。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Null detector and AC voltage reference based on MEMS

This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.

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29th Conference on Precision Electromagnetic Measurements (CPEM 2014)

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