利用掺锗硅(n-Si)制造抗辐射器件和集成电路

S. V. Bytkin
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引用次数: 3

摘要

我们已经研究了锗掺杂CZ硅(n-Si)在硬双极npn晶体管、集成电路和低功率晶闸管制造中的可能应用。双极npn晶体管的辐射灵敏度取决于源硅片中锗的浓度。采用介电隔离技术在初始n-Si晶圆上制造的双极TTL IC,其功能故障水平在理论上可能比采用标准技术制造的双极TTL IC高8倍,锗掺杂浓度可达7.5/spl倍/10/sup / 19/ cm/sup -3/。对于在n-Si上制造的npnp结构,本研究表明晶闸管保持电流的辐射硬度有所提高。
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Use of germanium doped silicon (n-Si) for manufacturing radiation hardened devices and integrated circuits
We have investigated the possible application of germanium doped CZ silicon, (n-Si) to the manufacture of rad hard bipolar npn transistors, ICs and low power thyristors. The radiation sensitivity of bipolar npn transistors depends on the Ge concentration in the source silicon wafers. The functional failure level of bipolar TTL IC, manufactured using dielectric isolation technology on initial n-Si wafers, doped by germanium up to a concentration of 7.5/spl times/10/sup 19/ cm/sup -3/, may be theoretically eight times greater, than for those, manufactured by the standard technology. For npnp structures, manufactured on n-Si this work showed the radiation hardness improvement of the thyristor holding current.
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