45纳米及以上的嵌入式SRAM电路设计技术

H. Yamauchi
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引用次数: 25

摘要

本文描述了自65纳米制程产生以来,SRAM在位元尺寸和工作电压(Vdd)方面的缩放趋势。回顾和讨论了延长6T SRAM寿命的关键设计解决方案,包括与8T SRAM相比可能的位单元缩放趋势。写入裕度(WRM)、静态噪声裕度(SNM)和单元电流(Icell)的3个关键裕度对Vdd和MOSFET通道特征尺寸的缩放比的依赖性已经被证明可以澄清缩放中的实际问题。预测了6T和8T ram的位元面积缩放趋势。已经证明,6T的面积将在32nm处接近8T的面积,并且应该在22nm左右交叉。此外,还回顾和讨论了随着结垢阈值电压(Vt)和栅氧化层厚度的增加而增加失控泄漏的设计方案。
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Embedded SRAM circuit design technologies for a 45nm and beyond
This paper describes what has been happening in SRAM scaling trend in terms of bit-cell size and operating voltage (Vdd) since 65 nm process generation. The key design solutions to extend a 6T SRAM lifetime are reviewed and discussed including a possible bit cell scaling trend comparing with an 8T SRAM as one of the successors. Each dependency of 3 key margins of write margin (WRM), static noise margin (SNM), and cell current (Icell) on the scaling ratio of Vdd and MOSFET channel feature size has been shown to clarify the real issues in the scaling. The bit cell area scaling trends of 6T and 8T SRAMs are predicted. It has been shown that the area of 6T will be getting closer to that of 8T at 32 nm and should cross over around 22 nm. In addition, design solutions to brake on runaway leakage increasing with scaling threshold voltage (Vt) and gate oxide thickness are reviewed and discussed.
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