一种新型弯曲板波角速率传感器

1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027) Pub Date : 1999-10-17 DOI:10.1109/ULTSYM.1999.849447

C. S. Lee, K. No, D. Wee, J. H. Lee, C. Choi

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引用次数: 6

摘要

设计并制作了基于压电PbZrxTi1-xO3 (PZT)薄膜的硅微机械弯曲板波致动器，用于角速率传感器。研究了基于波浪的角速率传感器的工作原理。

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A novel angular rate sensor employing flexural plate wave

We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZr_xTi_1-xO₃ (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.

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1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)

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