超薄射频芯片与柔性无线集线器在聚合物箔中的嵌入与互连

G. Alavi, Sefa Özbek, Mahsa Rasteh, M. Grözing, M. Berroth, J. Hesselbarth, Joachim N.Burghartz
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引用次数: 2

摘要

采用CMOS兼容的Chip-Film Patch (CFP)技术,开发了一种灵活、自适应、节能的高速无线集线器,作为混合箔片系统(HySiF)。在这种情况下,SiGe BiCMOS硅芯片(2.39 × 1.65 mm2)被减薄至45 μ m,并正面嵌入在双聚合物CFP柔性箔载体中。利用自适应布局技术,将嵌入硅芯片的有源衬垫延伸到箔片表面,并与箔片上的天线相互连接。一个薄芯片功率放大器(PA)嵌入在柔性聚合物箔中,并以5.5 GHz的信号传输与天线互连。系统的总厚度低于100µm,因此可弯曲至4 mm的曲率半径。
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Embedding and Interconnecting of Ultra-Thin RF Chip in Combination with Flexible Wireless Hub in Polymer Foil
a flexible and adaptive energy-efficient high-speed wireless hub is developed as a Hybrid System-in-Foil (HySiF) using CMOS compatible Chip-Film Patch (CFP) technology. In this matter, the SiGe BiCMOS silicon chips (2.39 × 1.65 mm2) are thinned down to 45 µm and are embedded face-up inside a two-polymer CFP flexible foil carrier. The active pads of embedded silicon chips inside foil are extended to the surface of the foil and interconnected to the antenna fabricated on the foil using an adaptive layout technique. A thin chip power amplifier (PA) is embedded in flexible polymer foil and is interconnected to the antenna with a signal transmission at 5.5 GHz. The overall thickness of system is below 100 µm and, thus, has bendability down to 4 mm radius of curvature.
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