Mo-S-C多组分薄膜的制备及性能研究

Wang Song, Chen Fenglei, Chen Xiang, Yan Jiangbo
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引用次数: 0

摘要

采用离子束辅助沉积(IBAD)和低温离子硫化相结合的方法制备了Mo-S-C多组分薄膜。采用扫描电镜(SEM)、三维白轮廓仪、拉曼光谱、纳米硬度计和UMT摩擦试验机对材料进行了显微组织分析和摩擦学性能测试。结果表明,由强化相纳米晶mo1 -x和润滑型MoS2、FeS组成的复合结构均匀分散在非晶C基体中,是获得优异摩擦学性能的关键因素。
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Study on the Fabrication and Properties of Mo-S-C Multicomponent Film
A Mo-S-C multicomponent film is prepared by ion beam assisted deposition (IBAD) combined with low temperature ion sulfurization. The microstructural analyses and the tribological performance are performed on the scanning electron microscope (SEM), three-dimensional white profile meter, Raman spectrum, Nano-hardness tester and UMT friction tester. The result shows that the composite structure, composed of strengthening phase nanocrystallites MoC1-x and lubricative MoS2, FeS, which uniformly dispersed in the amorphous C matrix, is the crucial factor of the excellent tribological performance.
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