LTCC技术制造3D电阻器的可能性

M. Klíma, I. Szendiuch
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引用次数: 1

摘要

本文讨论了在低温共烧陶瓷(LTCC)衬底上制作三维(3D)电阻器。它特别侧重于可靠性和可重复性的制造和设计方式。3D电阻器是由充满电阻膏的过孔制成的。为了填充孔,使用模板印刷。它们有两种排列方式——直线或之字形。研究的目标是找出最佳的连通层数、烧结后电阻膏体的结构、电阻率值的散射。
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Possibilities of making 3D resistors in LTCC technology
The Article deals with three-dimensional (3D) resistors making in Low Temperature Co-fired Ceramic (LTCC) substrates. It is especially focused on a manner of fabrication and design for reliability and reproducibility. 3D resistors are created of vias filled with a resistive paste. To fill the vias, stencil-printing is used. There are two ways of their arrangement through more layers - directly in line or zigzag. The research targets on finding the optimal count of connected layers, structure of resistive paste after firing, scattering of values of resistivity.
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