On-chip intra decoupling measurements for integrated magnetic thin film

Performance of magnetic thin-film is evaluated as a candidate for on-chip noise suppressor. Miniature loops coils implemented on a 90 nm design test element group (TEG) chip are used as the noise transmitter and receiver. Differential transmission parameter Sdd21 is evaluated as a measure of inductive noise intra-decoupling. Magnetic film is useful for frequency selective noise decoupler. The coupling is supported most at the ferromagnetic resonance (FMR) frequency, which is deviated from its intrinsic frequency and the degree of deviation can be calculated by using characteristic length. These results demonstrate that the proposed method is useful to characterize the IC chip level noise suppressor in the GHz range.