{"title":"半导体制造中的新兴范例","authors":"P. Castrucci","doi":"10.1109/ISMSS.1990.66123","DOIUrl":null,"url":null,"abstract":"Four integration trends in semiconductor manufacturing are discussed: simulation-controlled fabricators, integrated process tools, integrated yield management systems, and integrated SMART/microenvironment production lines. Specific examples are used to explain the value of these four technologies in the fab of the 1990s, characterizing these paradigms by short cycle times, high yields, low inventories, high throughput, continuous-flow production, dynamic capacity reconfiguration, high-quality/zero-defect products, tight statistical control, and low cost. It is projected that the causes for accelerating adaptation to this new type of fab will shift the semiconductor paradigms from manual factories to integrated production lines.<<ETX>>","PeriodicalId":398535,"journal":{"name":"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Emerging paradigms in semiconductor manufacturing\",\"authors\":\"P. Castrucci\",\"doi\":\"10.1109/ISMSS.1990.66123\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Four integration trends in semiconductor manufacturing are discussed: simulation-controlled fabricators, integrated process tools, integrated yield management systems, and integrated SMART/microenvironment production lines. Specific examples are used to explain the value of these four technologies in the fab of the 1990s, characterizing these paradigms by short cycle times, high yields, low inventories, high throughput, continuous-flow production, dynamic capacity reconfiguration, high-quality/zero-defect products, tight statistical control, and low cost. It is projected that the causes for accelerating adaptation to this new type of fab will shift the semiconductor paradigms from manual factories to integrated production lines.<<ETX>>\",\"PeriodicalId\":398535,\"journal\":{\"name\":\"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISMSS.1990.66123\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI International Symposium on Semiconductor Manufacturing Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISMSS.1990.66123","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Four integration trends in semiconductor manufacturing are discussed: simulation-controlled fabricators, integrated process tools, integrated yield management systems, and integrated SMART/microenvironment production lines. Specific examples are used to explain the value of these four technologies in the fab of the 1990s, characterizing these paradigms by short cycle times, high yields, low inventories, high throughput, continuous-flow production, dynamic capacity reconfiguration, high-quality/zero-defect products, tight statistical control, and low cost. It is projected that the causes for accelerating adaptation to this new type of fab will shift the semiconductor paradigms from manual factories to integrated production lines.<>
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