Ge摩尔分数对高掺杂纳米级Si1−xGex/Si p-n二极管电流、电压和电场特性的影响

A. Narottama, A. Sapteka
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Besides that, higher Ge mole fraction has lower energy difference between P side and N side of diode. According to the simulation result, Si<inf>0.8</inf>Ge<inf>0.2</inf> has energy band gap about 0.8 eV, meanwhile Si0.3Ge0.7 has energy band gap about 0.5 eV. Lower energy band gap causes more electrons have enough energy to cross the junction. Meanwhile under reverse bias voltage, high doping nanoscale diode will produce infinitesimal current. At the junction, high doping nanoscale Si<inf>1−x</inf>Ge<inf>x</inf>/Si P-N diode also has lower electric field (measured at the center of diode) at higher Ge mole fraction. Under reverse bias voltage of −2 V, Si<inf>0.3</inf>Ge<inf>0.7</inf> has maximum electric field about 5.89 × 10<sup>6</sup> V/m, meanwhile Si<inf>0.8</inf>Ge<inf>0.2</inf> has maximum electric field about 6.17 × 10<sup>6</sup> V/m. We predict that Ge mole fraction has inversely proportional effect to the maximum electric field value. 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摘要

本文报道了利用Cogenda Visual TCAD对高掺杂纳米异质结二极管(特别是Si1−xGex/Si p-n二极管)的模拟。为了了解该二极管的电学特性,我们详尽地模拟了锗摩尔分数对SiGe材料电流、电压和电场特性的影响。模拟了锗摩尔分数为0.2 ~ 0.7的SiGe材料为受体,Si材料为施主。受体和供体浓度均为1020 / cm3,面积为10 × 10 nm2。在正向偏置电压下,较高的Ge摩尔分数会产生较高的电流。这种现象的发生是由于在较高的Ge摩尔分数条件下能隙较低。此外,Ge摩尔分数越高,二极管P侧和N侧的能差越小。仿真结果表明,Si0.8Ge0.2的能带隙约为0.8 eV, Si0.3Ge0.7的能带隙约为0.5 eV。较低的能带间隙使更多的电子有足够的能量穿过结。同时,在反向偏置电压下,高掺杂纳米级二极管产生的电流是无穷小的。在结处,高掺杂的纳米级Si1−xGex/Si P-N二极管在较高的Ge摩尔分数下也具有较低的电场(在二极管中心测量)。在−2 V的反向偏置电压下,Si0.3Ge0.7的最大电场约为5.89 × 106 V/m, Si0.8Ge0.2的最大电场约为6.17 × 106 V/m。我们预测Ge摩尔分数与最大电场值成反比。因此,我们得出Ge摩尔分数影响高掺杂纳米级Si1−xGex/Si P-N二极管的电流、电压和电场特性的结论。
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Effect of Ge mole fraction on current, voltage and electric field characteristics of high doping nanoscale Si1−xGex/Si p-n diode
In this paper, we report the simulation of high doping nanoscale heterojunction diode, particularly Si1−xGex/Si p-n diode, using Cogenda Visual TCAD. In order to gain knowledge on electrical properties of this diode, we exhaustively simulate the effect of Ge mole fraction in SiGe material on current, voltage and electric field characteristics. The simulation covers Ge mole fraction of 0.2 to 0.7 in SiGe material as acceptor and Si material as donor. Both acceptor and donor have concentrations of 1020 per cm3 and areas of 10 × 10 nm2. Under forward bias voltage, higher Ge mole fraction will produce higher current. This phenomenon happens due to lower energy band gap at higher Ge mole fraction condition. Besides that, higher Ge mole fraction has lower energy difference between P side and N side of diode. According to the simulation result, Si0.8Ge0.2 has energy band gap about 0.8 eV, meanwhile Si0.3Ge0.7 has energy band gap about 0.5 eV. Lower energy band gap causes more electrons have enough energy to cross the junction. Meanwhile under reverse bias voltage, high doping nanoscale diode will produce infinitesimal current. At the junction, high doping nanoscale Si1−xGex/Si P-N diode also has lower electric field (measured at the center of diode) at higher Ge mole fraction. Under reverse bias voltage of −2 V, Si0.3Ge0.7 has maximum electric field about 5.89 × 106 V/m, meanwhile Si0.8Ge0.2 has maximum electric field about 6.17 × 106 V/m. We predict that Ge mole fraction has inversely proportional effect to the maximum electric field value. Therefore, we concluded that Ge mole fraction affects current, voltage and electric field characteristics of high doping nanoscale Si1−xGex/Si P-N diode.
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