{"title":"热超声键合换能器动力学的非线性行为","authors":"Lei Han, J. Zhong","doi":"10.1109/HDP.2006.1707568","DOIUrl":null,"url":null,"abstract":"Energy for deformation, metamorphism and interconnection of metals, is mainly from high frequency pressure/shear loads via a PZT transducer assembly. Dynamical characteristics of PZT actuated transducer assembly are the key to reliable fine pitch bonding and basic understanding of metal interconnection. By using high frequency recording electronics devices and a powerful Polytec laser Doppler vibrometer, a systematic experimental observations and analysis clearly exhibit that, rich phenomena and effects like the negative cubic stiffness, dynamical coupling between transducer main body and tool, may be explained by nonlinear features of PZT transducer assembly on its bonding targets. It will be possible to explore their mechanism and effects to bonding quality by identifying and decoding them from experimental data","PeriodicalId":406794,"journal":{"name":"Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, 2006. HDP'06.","volume":"447 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Nonlinear behaviors of transducer dynamics for thermosonic bonding\",\"authors\":\"Lei Han, J. Zhong\",\"doi\":\"10.1109/HDP.2006.1707568\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Energy for deformation, metamorphism and interconnection of metals, is mainly from high frequency pressure/shear loads via a PZT transducer assembly. Dynamical characteristics of PZT actuated transducer assembly are the key to reliable fine pitch bonding and basic understanding of metal interconnection. By using high frequency recording electronics devices and a powerful Polytec laser Doppler vibrometer, a systematic experimental observations and analysis clearly exhibit that, rich phenomena and effects like the negative cubic stiffness, dynamical coupling between transducer main body and tool, may be explained by nonlinear features of PZT transducer assembly on its bonding targets. It will be possible to explore their mechanism and effects to bonding quality by identifying and decoding them from experimental data\",\"PeriodicalId\":406794,\"journal\":{\"name\":\"Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, 2006. HDP'06.\",\"volume\":\"447 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-06-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, 2006. HDP'06.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/HDP.2006.1707568\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference on High Density Microsystem Design and Packaging and Component Failure Analysis, 2006. HDP'06.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HDP.2006.1707568","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nonlinear behaviors of transducer dynamics for thermosonic bonding
Energy for deformation, metamorphism and interconnection of metals, is mainly from high frequency pressure/shear loads via a PZT transducer assembly. Dynamical characteristics of PZT actuated transducer assembly are the key to reliable fine pitch bonding and basic understanding of metal interconnection. By using high frequency recording electronics devices and a powerful Polytec laser Doppler vibrometer, a systematic experimental observations and analysis clearly exhibit that, rich phenomena and effects like the negative cubic stiffness, dynamical coupling between transducer main body and tool, may be explained by nonlinear features of PZT transducer assembly on its bonding targets. It will be possible to explore their mechanism and effects to bonding quality by identifying and decoding them from experimental data
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