用于单片光学频率参考的低阈值功率和低相位噪声的晶圆级硅光机械振荡器

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318797

A. Grine, N. Quack, K. Grutter, T. Rocheleau, J. Huang, C. Nguyen, M. Wu

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引用次数: 1

摘要

我们提出了具有低阈值功率(光学= 5.3M，相位噪声为-110dBc/Hz (10kHz偏移，18.6MHz载波)的晶圆级加工光机械振荡器。对相位噪声进行了建模，并与量子光学和量子机械相比较进行了测量。

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Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references

We present wafer-scale processed optomechanical oscillators with low threshold power (<;120μW) owing to high Q_optical = 5.3M, with phase noise of -110dBc/Hz (10kHz offset, 18.6MHz carrier). Phase noise is modeled, and measured vs. Q_optical and Qmechanical.

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2012 International Conference on Optical MEMS and Nanophotonics

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