Single-substrate Microfluidic Systems on PET Film for mm-Wave Sensors

A complementary approach to the fabrication of microfluidic systems is presented with the aim of reducing attenuation of resonator-based sensors in proximity of aqueous media. Contrary to state-of-the-art techniques, the channel system is dry-etched into a PET film, which also carries a functional RF metalization forming an array of split-ring resonators. This technique is easy to implement in standard micro-lithography and provides high flexibility in placement of the electrodes. Verified process parameters for etching depths up to $\boldsymbol{13.5\mu \mathrm{m}}$. are presented together with a functional concept validation, comparing fullwave simulation results to a prototype device.