低噪声气体效应管失效机理及可靠性研究

J. Irvin, A. Loya
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引用次数: 3

摘要

各种应力老化技术加速了低噪声GaAs fet的退化和失效,包括在有偏置和无偏置的高温下储存,在有偏置和无偏置的潮湿环境中暴露,以及温度循环。已经观察到几种时间-温度偏置引起的灾难性破坏机制,所有这些机制都涉及Al栅金属化。这些机制是Au-Al相形成、Al电迁移和电解腐蚀。这些过程中的每一个最终都会导致一个敞开的大门。加速老化也会导致直流和射频特性的逐渐长期退化,尽管两者并不总是相关的。事实上,与一些预期相反,接触电阻可以增加近两个数量级,而不会显著降低低噪声晶体管的噪声系数或增益。除了接触电阻外,通道中的陷阱等其他机制被认为在射频特性的退化中起作用。研究发现,所有重要的退化机制都是偏差敏感的,无偏差的老化给出了错误的长寿命预测。所观察到的累积失效分布近似为对数正态关系,标准差在0.6 ~ 1.4之间。相关的降解或失效过程的活化能接近1.0 eV,这导致在60°C(通道温度)下的预计中位寿命超过107小时,相应的故障率(婴儿死亡率除外)在20年的服务中低于40 FITs(每109个设备小时40个)。
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Failure mechanisms and reliability of low-noise gaas fets
The degradation and failure of low-noise GaAs FETs have been accelerated by various stress-aging techniques including storage at elevated temperatures with and without bias, exposure to humid atmospheres with and without bias, and temperature cycling. Several time-temperature-bias-induced catastrophic failure mechanisms have been observed, all involving the Al gate metallization. These mechanisms are Au-Al phase formation, Al electromigration, and electrolytic corrosion. Each of these processes results ultimately in an open gate. Accelerated aging also produces gradual, long-term degradation in both dc and RF characteristics, though the two are not always correlated. In fact, contrary to some expectations, contact resistance may increase almost two orders of magnitude without significant degradation in the noise figure or gain of a low-noise transistor. Besides contact resistance, other mechanisms such as traps in the channel are thought to play a role in the degradation of RF properties. It was found that all the important degradation mechanisms are bias-sensitive and that aging without bias gives erroneously long lifetime projections. The cumulative failure distributions for the mechanisms observed approximate a log-normal relation with standard deviations between 0.6 and 1.4. The relevant degradation or failure processes have activation energies near 1.0 eV, which give rise to projected median lifetimes at 60°C (channel temperature) over 107 hours and corresponding failure rates (excepting infant mortality) under 40 FITs (40 per 109 device-hours) at 20 years of service.
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