DLL based temperature compensated MEMS clock

In this paper the design and implementation of a delay-locked loop based temperature compensated MEMS clock is presented. The system is providing a temperature compensated 48 MHz clock signal for the range of − 40 to 85 °C. The temperature compensation is achieved by a combination of initial and an autonomous background calibration. The main design guidelines have been on high integration level and minimum silicon area while maintaining a low timing jitter and power consumption. The design was implemented by utilizing Austria Micro Systems (AMS) 0.35 µm standard CMOS process technology. The implementation occupies 1.75 mm2 of silicon area.