T. Dankwort, Minhaz Ahmed, S. Grünzig, Anmol Khare, B. Gojdka
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High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting
This article reports on the performance and long-term stability of MEMS energy harvesters with wafer-level integrated micromagnets and aluminum scandium nitride (AlScN) as piezoelectric transducer layer. Broadband excitation via magnetic plucking is demonstrated with high power outputs of more than $85 \mu \mathrm{W}$ RMS. Furthermore, no significant degradation of the performance was observed after 13 million excitation events by magnetic plucking.
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