{"title":"有机和非有机样品的μ-XRFA和μ-EXAFS测量:状态报告","authors":"A. Erko","doi":"10.1117/12.675625","DOIUrl":null,"url":null,"abstract":"The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.","PeriodicalId":406438,"journal":{"name":"SPIE Optics + Photonics","volume":"241 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"μ-XRFA and μ-EXAFS measurements of organic and non-organic samples: status report\",\"authors\":\"A. Erko\",\"doi\":\"10.1117/12.675625\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.\",\"PeriodicalId\":406438,\"journal\":{\"name\":\"SPIE Optics + Photonics\",\"volume\":\"241 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE Optics + Photonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.675625\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE Optics + Photonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.675625","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
μ-XRFA and μ-EXAFS measurements of organic and non-organic samples: status report
The capabilities of the KMC-2 beamline at BESSY for spatially resolved x-ray measurements with micro- and nanometer resolution are reviewed. An application of micro- X-ray fluorescence analysis (μXRFA), micro-extended X-ray absorption fine structure (μEXAFS), micro-X-ray absorption near-edge structure (μXANES) as well as standing wave technique (SWT) as a powerful method for the organic and non-organic samples characterization with synchrotron radiation is discussed. Mono and poly-capillary optical systems were used for characterization of organic and non-organic samples, by means of μXRFA mapping and μEXAFS and μXANES. The results of depth resolved tungsten XAFS measurements in a Si/W/Si trilayer embedded in a Au waveguide structure are presented. A depth resolution on the order of 1nm has been achieved.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
