无极化定向耦合器刻蚀深度分析

Ali Emre Kaplan, J. V. D. van der Tol, P. Bassi, G. Bellanca
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引用次数: 0

摘要

对刻蚀深度作为实现集成极化无关定向耦合器的设计参数进行了数值分析。通过有限元模拟,研究了不同刻蚀深度下器件耦合段的横向电(TE)极化和横向磁(TM)极化耦合系数。通过优化刻蚀深度,所提出的耦合器可以在宽带中实现类似的两种极化。仿真结果表明,在100 nm波长范围内,TE和TM耦合系数之间的最小差值可以保持在1%以内。
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Analysis of Etch Depth for Polarization-free Directional Couplers
We numerically analyze the etch depth as a design parameter for the realization of integrated polarization independent directional couplers. Through finite-element-method simulations, the coupling coefficients of transverse-electric (TE) and transverse-magnetic (TM) polarizations are investigated according to different etch depth levels in the coupling section of the studied device. By optimizing etching depth, the proposed coupler can perform similarly for both polarizations in broadband. According to simulation results, the minimum difference between the TE and TM coupling coefficients can be kept less than 1% in 100 nm of the wavelength range.
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