通道中铟含量对高电子迁移率晶体管电性能的影响

N.F. Idham M, A.I. Ahmad Ismat, S. Rasidah, D. Asban, M. Razman Y, A.M. Abdul Fatah
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引用次数: 3

摘要

相对于在GaAs衬底上的拟晶型高电子迁移率晶体管和在InP衬底上的晶格匹配型高电子迁移率晶体管,变形InAlAs/InGaAs高电子迁移率晶体管(HEMT)具有许多优点。与衬底相匹配的通道晶格中铟含量高(50%)是其具有优异变质HEMT性能的关键因素。变质HEMT允许InGaAs通道组成的灵活范围从30%到80%(基于应用)[1]在组成渐变的缓冲上。利用市售的TCAD模拟变质HEMT,研究通道层中铟%的变化对器件电特性的影响。
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Effect of Indium Content in the Channel on the Electrical Performance of Metamorphic High Electron Mobility Transistors
Metamorphic InAlAs/InGaAs high electron mobility transistors (HEMT) has demonstrated several advantages over pseudomorphic-HEMT on GaAs and lattice matched-HEMT on InP substrate. The high Indium content of the channel (50%) lattice matched to the substrate is the key factor behind the superior metamorphic HEMT performance. Metamorphic HEMT allows a flexible range of InGaAs channel compositions from 30% to 80% (based on the applications) [1] on a compositionally graded buffer. Commercially available TCAD is used to simulate the metamorphic HEMT to study the effect of varying Indium % in the channel layer on the electrical characteristics of the device.
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