Danming Wei, Ruoshi Zhang, M. Saadatzi, Olalekan O. Olowo, D. Popa
{"title":"用于人机物理交互的有机压阻压敏机器人皮肤","authors":"Danming Wei, Ruoshi Zhang, M. Saadatzi, Olalekan O. Olowo, D. Popa","doi":"10.1115/detc2020-22604","DOIUrl":null,"url":null,"abstract":"\n Pressure sensitive robotic skins have long been investigated for applications to physical human-robot interaction (pHRI). Numerous challenges related to fabrication, sensitivity, density, and reliability remain to be addressed under various environmental and use conditions. In our previous studies, we designed novel strain gauge sensor structures for robotic skin arrays. We coated these star-shaped designs with an organic polymer piezoresistive material, Poly (3, 4-ethylenedioxythiophene)-ploy(styrenesulfonate) or PEDOT: PSS and integrated sensor arrays into elastomer robotic skins. In this paper, we describe a dry etching photolithographic method to create a stable uniform sensor layer of PEDOT:PSS onto star-shaped sensors and a lamination process for creating double-sided robotic skins that can be used with temperature compensation. An integrated circuit and load testing apparatus was designed for testing the resulting robotic skin pressure performance. Experiments were conducted to measure the loading performance of the resulting sensor prototypes and results indicate that over 80% sensor yields are possible with this fabrication process.","PeriodicalId":229776,"journal":{"name":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Organic Piezoresistive Pressure Sensitive Robotic Skin for Physical Human-Robot Interaction\",\"authors\":\"Danming Wei, Ruoshi Zhang, M. Saadatzi, Olalekan O. Olowo, D. Popa\",\"doi\":\"10.1115/detc2020-22604\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Pressure sensitive robotic skins have long been investigated for applications to physical human-robot interaction (pHRI). Numerous challenges related to fabrication, sensitivity, density, and reliability remain to be addressed under various environmental and use conditions. In our previous studies, we designed novel strain gauge sensor structures for robotic skin arrays. We coated these star-shaped designs with an organic polymer piezoresistive material, Poly (3, 4-ethylenedioxythiophene)-ploy(styrenesulfonate) or PEDOT: PSS and integrated sensor arrays into elastomer robotic skins. In this paper, we describe a dry etching photolithographic method to create a stable uniform sensor layer of PEDOT:PSS onto star-shaped sensors and a lamination process for creating double-sided robotic skins that can be used with temperature compensation. An integrated circuit and load testing apparatus was designed for testing the resulting robotic skin pressure performance. Experiments were conducted to measure the loading performance of the resulting sensor prototypes and results indicate that over 80% sensor yields are possible with this fabrication process.\",\"PeriodicalId\":229776,\"journal\":{\"name\":\"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-08-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1115/detc2020-22604\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Volume 1: 14th International Conference on Micro- and Nanosystems (MNS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/detc2020-22604","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Organic Piezoresistive Pressure Sensitive Robotic Skin for Physical Human-Robot Interaction
Pressure sensitive robotic skins have long been investigated for applications to physical human-robot interaction (pHRI). Numerous challenges related to fabrication, sensitivity, density, and reliability remain to be addressed under various environmental and use conditions. In our previous studies, we designed novel strain gauge sensor structures for robotic skin arrays. We coated these star-shaped designs with an organic polymer piezoresistive material, Poly (3, 4-ethylenedioxythiophene)-ploy(styrenesulfonate) or PEDOT: PSS and integrated sensor arrays into elastomer robotic skins. In this paper, we describe a dry etching photolithographic method to create a stable uniform sensor layer of PEDOT:PSS onto star-shaped sensors and a lamination process for creating double-sided robotic skins that can be used with temperature compensation. An integrated circuit and load testing apparatus was designed for testing the resulting robotic skin pressure performance. Experiments were conducted to measure the loading performance of the resulting sensor prototypes and results indicate that over 80% sensor yields are possible with this fabrication process.