一种用低频介电光谱表征玻璃微珠洁净度的测试结构

Proceedings of the 2015 International Conference on Microelectronic Test Structures Pub Date : 2015-03-23 DOI:10.1109/ICMTS.2015.7106111

M. Buehler

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摘要

使用测试结构和工作在10 mHz和100 kHz之间的低频介电光谱来评估玻璃珠的清洁度。玻璃微珠暴露在40 - 85%相对湿度之间。结果表明，毛细管水和膜水可以用来指示清洁状态。

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A test structure for characterizing the cleanliness of glass beads using low-frequency dielectric spectroscopy

The cleanliness of glass beads was assessed using a test structure and low-frequency dielectric spectroscopy operating between 10 mHz and 100 kHz. Glass beads were exposed to moisture between 40 and 85% RH. Results indicate that capillary and film water can be used to indicate the state of cleanliness.

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Proceedings of the 2015 International Conference on Microelectronic Test Structures

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