{"title":"低损耗liga共面波导和滤波器","authors":"M. Forman","doi":"10.1109/APMC.2006.4429780","DOIUrl":null,"url":null,"abstract":"A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.","PeriodicalId":137931,"journal":{"name":"2006 Asia-Pacific Microwave Conference","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"Low-loss LIGA-fabricated coplanar waveguide and filter\",\"authors\":\"M. Forman\",\"doi\":\"10.1109/APMC.2006.4429780\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.\",\"PeriodicalId\":137931,\"journal\":{\"name\":\"2006 Asia-Pacific Microwave Conference\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 Asia-Pacific Microwave Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APMC.2006.4429780\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 Asia-Pacific Microwave Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APMC.2006.4429780","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Low-loss LIGA-fabricated coplanar waveguide and filter
A low-loss LIGA-fabricated conductor- backed coplanar waveguide and filter are presented. The copper transmission lines are 517 mum thick and are fabricated directly on quartz in a uniplanar X- ray lithography process. The conductor-backed CPW achieves a measured attenuation of 0.090 dB/cm at 18 GHz with low dispersion over the bandwidth of interest. A bandpass filter is realized using the thick-metal CPW with with two shorted quarter-wave resonators, which provide a passband between 6 and 11 GHz and a loss of -1 dB at 8.5 GHz.
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