分析了通用型、生物医学型和生态型热流传感器的发展现状

S. Pavlov, W. Wójcik, R. Holyaka, O. D. Azarov, S. V. Bohomolov, Yang Longyin
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引用次数: 0

摘要

本文分析了微电子流量传感器的特点,从而得出了一些重要的结论,即:现代微电子热流传感器,特别是生物医学传感器,具有多种信号形成原理的特点-从基于一个敏感元件的基本线性变换器到基于功能集成元件矩阵的非线性(生成,时变)变换器。热流传感器的能量消耗问题仍然是相关的。这在为目标传感器供电时尤其具有特点,即小尺寸、低功耗、低压电化学电池。能量消耗(功率和加热温度)的降低会导致信号线电阻的寄生效应,从而导致功能特性的恶化,特别是导致流量测量精度的降低。
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Analysis of development state of the thermal flow sensors of general, biomedical and ecological designation
The paper analyzed the characteristics of microelectronic flow sensors, which made it possible to draw a number of important conclusions, namely: modern microelectronic thermal flow sensors, and in particular biomedical sensors, are characterized by a significant variety of principles of signal formation - from elementary linear converters based on one sensitive element to non-linear ones ( generation, time-dependent) converters based on matrices of functionally integrated elements. The problem of energy consumption of thermal flow sensors remains relevant. This is especially characteristic when powering destination sensors from autonomous, i.e., small-sized, low-power, low-voltage electrochemical cells. A decrease in energy consumption (power and heating temperature) leads to the parasitic effect of signal line resistances and, as a result, to the deterioration of functional characteristics, in particular, to a decrease in the accuracy of flow rate measurement.
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