Hyeon-cheol Park, Jung-Hwan Lee, Sang-Gil Park, K. Jeong
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Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning
Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.
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